In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, ...
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO(3) sensing layer, an integrated Pt micro-heater ...
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, ...
Apr 17, 2009 · In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated ...
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, ...
In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, ...
Nov 14, 2018 · Bibliographic details on A MEMS-based Benzene Gas Sensor with a Self-heating WO 3 Sensing Layer.
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Supplementary Data. A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer. Authors: Lung-Ming Fu; Chia-Yen Lee; Mu-Tsun Lee; Ming-Tsun Ke.
A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer. Sensors 2009, 9, 2895-2906. https://doi.org/10.3390/s90402895. AMA Style. Ke M-T, Lee ...
A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer · Engineering, Materials Science. Sensors · 2009.